プラズマとスパッタ粒子空間分布の可視化--プレーナマグネトロン放電からPDP放電まで

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Material Type: 記事
Title: プラズマとスパッタ粒子空間分布の可視化--プレーナマグネトロン放電からPDP放電まで
Author/Editor: 松田良信
大友晃治
太田秀憲他
Author Heading: 松田良信
大友晃治
太田秀憲
Periodical title: 映像情報メディア学会技術報告 = ITE technical report
No. or year of volume/issue: 24(36) 2000.6
Volume: 24
Issue: 36
Pages: 13～18
Publication date of volume/issue (W3CDTF): 2000-06
ISSN (Periodical Title): 1342-6893
ISSN-L (Periodical Title): 1342-6893
Publication (Periodical Title): 東京 : 映像情報メディア学会
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: ITO
反応性スパッタリング
発光分光
planar magnetron
reactive sputtering
optical emission
NDLC: ZN33
Target Audience: 一般
Report No. (Article): IPU2000-38
Holding library: 国立国会図書館
Call No.: Z16-1010
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 5476785
http://id.ndl.go.jp/bib/5476785
Bibliographic Record Category (NDL): 632