解説表面マイクロマシニング型センサ(小特集1 シリコンエッチング技術(2))

Journal name: 表面技術 = Journal of the Surface Finishing Society of Japan 51(9) 2000.9

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Material Type: 記事
Title: 解説表面マイクロマシニング型センサ
Author/Editor: 船橋博文
島岡敬一
藤塚徳夫他
Series Title: 小特集1 シリコンエッチング技術(2)
Author Heading: 船橋博文
島岡敬一
藤塚徳夫
Periodical title: 表面技術 = Journal of the Surface Finishing Society of Japan
No. or year of volume/issue: 51(9) 2000.9
Volume: 51
Issue: 9
Pages: 880～884
Publication date of volume/issue (W3CDTF): 2000-09
ISSN (Periodical Title): 0915-1869
ISSN-L (Periodical Title): 0915-1869
Publication (Periodical Title): 東京 : 表面技術協会
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: Surface Micromachining
Sacrificial Layer
Pressure
Infrated
Sensor
NDLC: ZP41
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z17-291
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 5496984
http://id.ndl.go.jp/bib/5496984
Bibliographic Record Category (NDL): 632