Amorphous-to-Polycrystalline Silicon Transition in Hot Wire Cell Method

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Amorphous-to-Polycrystalline Silicon Transition in Hot Wire Cell Method

Call No. (NDL): Z53-A375
Bibliographic ID of National Diet Library: 5501341

Material type: 記事

Author: Mitsuru Ichikawaほか

Publisher: Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics

Publication date: 2000-08

Material Format: Digital

Journal name: Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP 39(8) (通号 525) 2000.8

Publication Page: p.4712～4715

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Detailed bibliographic record

Summary, etc.：: Hot Wire Cell method has been newly developed and successfully applied to grow polycrystalline silicon films at a low temperature with a relatively hi...

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Material Type: 記事
Title: Amorphous-to-Polycrystalline Silicon Transition in Hot Wire Cell Method
Author/Editor: Mitsuru Ichikawa
Takeshi Tsushima
Akira Yamada 他
Author Heading: Mitsuru Ichikawa
Takeshi Tsushima
Akira Yamada
Periodical title: Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
No. or year of volume/issue: 39(8) (通号 525) 2000.8
Volume: 39
Issue: 8
Sequential issue number: 525
Pages: 4712～4715
Publication date of volume/issue (W3CDTF): 2000-08
ISSN (Periodical Title): 0021-4922
ISSN-L (Periodical Title): 0021-4922
Publication (Periodical Title): Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics
Place of Publication (Country Code): JP
Text Language Code: eng
Subject Heading: amorphous silicon
poly-silicon
thin-film depostiion
low-temperature deposition
NDLC: ZM35
Target Audience: 一般
Collection (particular): 国立国会図書館デジタルコレクション > デジタル化資料 > 雑誌
https://dl.ndl.go.jp/collections/A00002
Access Restrictions: 国立国会図書館内限定公開
Service for the Digitized Contents Transmission Service: 図書館・個人送信対象
Availability of remote photoduplication service: 可
Holding library: 国立国会図書館
Call No.: Z53-A375
Periodical Title (Persistent ID (NDL)): info:ndljp/pid/11226597
https://dl.ndl.go.jp/pid/11226597
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 5501341
http://id.ndl.go.jp/bib/5501341
Bibliographic Record Category (NDL): 632