雑誌真空
小特集 プラズマの応...

小特集 プラズマの応用・材料開発

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小特集 プラズマの応用・材料開発

Call No. (NDL)
Z16-474
Bibliographic ID of National Diet Library
5512078
Material type
記事
Author
-
Publisher
東京 : 日本真空協会
Publication date
2000-09
Material Format
Paper
Journal name
真空 = Journal of the Vacuum Society of Japan 43(9) 2000.9
Publication Page
p.856~876
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Paper

Material Type
記事
Periodical title
真空 = Journal of the Vacuum Society of Japan
No. or year of volume/issue
43(9) 2000.9
Volume
43
Issue
9
Pages
856~876
Publication date of volume/issue (W3CDTF)
2000-09
ISSN (Periodical Title)
0559-8516
ISSN-L (Periodical Title)
0559-8516