Dislocations Preferentially Generated in Compressed Regions of Saddle-Shaped Deformed, Precipitation-Softened, Czochralski-Grown Silicon Wafers
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- Material Type
- 記事
- Author/Editor
- Hirofumi Shimizu
- Author Heading
- Periodical title
- Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
- No. or year of volume/issue
- 39(10) (通号 528) 2000.10
- Volume
- 39
- Issue
- 10
- Sequential issue number
- 528
- Pages
- 5727～5731