寄稿湿式研磨における化学的作用を調べるための加工装置

Journal name: 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会編 66(12) (通号 792) 2000.12

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Material Type: 記事
Title: 寄稿湿式研磨における化学的作用を調べるための加工装置
Author/Editor: 高橋裕
斎藤英輔
村上直英
Author Heading: 高橋裕
斎藤英輔
村上直英
Periodical title: 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会編
No. or year of volume/issue: 66(12) (通号 792) 2000.12
Volume: 66
Issue: 12
Sequential issue number: 792
Pages: 1981～1983
Publication date of volume/issue (W3CDTF): 2000-12
ISSN (Periodical Title): 0912-0289
ISSN-L (Periodical Title): 0912-0289
Publication (Periodical Title): 東京 : 精密工学会
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: wet polishing
mechanochemical reaction
debris
chemical analysis
closed system
NDLC: ZN12
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-466
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 5592433
http://id.ndl.go.jp/bib/5592433
Bibliographic Record Category (NDL): 632