Consideration of Deformation of TiN Thin Films with Preferred Orientation Prepared by Ion-Beam-Assisted Deposition
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- Material Type
- 記事
- Author/Editor
- Toshiyuki HayashiAkihito MatsumuroTomohiko Watanabe 他
- Author Heading
- Periodical title
- JSME international journal. Ser. A, Solid mechanics and material engineering
- No. or year of volume/issue
- 44(1) 2001.1
- Volume
- 44
- Issue
- 1
- Pages
- 94～99
- Publication date of volume/issue (W3CDTF)
- 2001-01