Experimental Results Obtained Using Extreme Ultraviolet Laboratory Tool at New SUBARU (Microprocesses & Nanotechnology)

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CiNii Research

Experimental Results Obtained Using Extreme Ultraviolet Laboratory Tool at New SUBARU(Microprocesses & Nanotechnology)

Call No. (NDL): Z53-A375
Bibliographic ID of National Diet Library: 5634976

Material type: 記事

Author: Hiroo Kinoshitaほか

Publisher: Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics

Publication date: 2000-12

Material Format: Digital

Journal name: Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP 39(12B) (通号 531) (増刊) 2000.12

Publication Page: p.6771～6776

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Detailed bibliographic record

Summary, etc.：: We have designed three-aspherical-mirror optics that meets the specifications for 0.1 μm generation lithography, and are developing an extreme ultravi...

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Digital

Material Type: 記事
Title: Experimental Results Obtained Using Extreme Ultraviolet Laboratory Tool at New SUBARU
Author/Editor: Hiroo Kinoshita
Takeo Watanabe
Series Title: Microprocesses & Nanotechnology
Author Heading: Hiroo Kinoshita
Takeo Watanabe
Periodical title: Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
No. or year of volume/issue: 39(12B) (通号 531) (増刊) 2000.12
Volume: 39
Issue: 12B
Sequential issue number: 531
Other Volume: 増刊
Pages: 6771～6776
Publication date of volume/issue (W3CDTF): 2000-12
ISSN (Periodical Title): 0021-4922
ISSN-L (Periodical Title): 0021-4922
Publication (Periodical Title): Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics
Place of Publication (Country Code): JP
Text Language Code: eng
Subject Heading: extreme ultraviolet lithography
single-layer resist
chemically amplified resist
aspherical mirror
scanning stage
NDLC: ZM35
Target Audience: 一般
Collection (particular): 国立国会図書館デジタルコレクション > デジタル化資料 > 雑誌
https://dl.ndl.go.jp/collections/A00002
Access Restrictions: 国立国会図書館内限定公開
Service for the Digitized Contents Transmission Service: 図書館・個人送信対象
Availability of remote photoduplication service: 可
Holding library: 国立国会図書館
Call No.: Z53-A375
Periodical Title (Persistent ID (NDL)): info:ndljp/pid/11196224
https://dl.ndl.go.jp/pid/11196224
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 5634976
http://id.ndl.go.jp/bib/5634976
Bibliographic Record Category (NDL): 632