Microprocesses & Nanotechnology
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- Material Type
- 記事
- Periodical title
- Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
- No. or year of volume/issue
- 39(12B) (通号 531) (増刊) 2000.12
- Volume
- 39
- Issue
- 12B
- Sequential issue number
- 531
- Other Volume
- 増刊
- Pages
- 6771～7171,巻頭5～6
- Publication date of volume/issue (W3CDTF)
- 2000-12