誘導結合高周波プラズマ支援マグネトロンスパッタによる光学多層膜フィルタの作製と二酸化炭素濃度検出への応用

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Material Type: 記事
Title: 誘導結合高周波プラズマ支援マグネトロンスパッタによる光学多層膜フィルタの作製と二酸化炭素濃度検出への応用
Author/Editor: 原仁
岸直輝
Author Heading: 原仁
岸直輝
Periodical title: 真空 = Journal of the Vacuum Society of Japan
No. or year of volume/issue: 44(4) 2001.4
Volume: 44
Issue: 4
Pages: 440～444
Publication date of volume/issue (W3CDTF): 2001-04
ISSN (Periodical Title): 0559-8516
ISSN-L (Periodical Title): 0559-8516
Publication (Periodical Title): 東京 : 日本真空協会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN15
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-474
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 5758605
http://id.ndl.go.jp/bib/5758605
Bibliographic Record Category (NDL): 632