Anomalous Surface Amorphization of Si(001) Induced by 3-5keV Ar〔+〕 Ion Bombardment
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- Material Type
- 記事
- Author/Editor
- Kaoru NakajimaHisami ToyofukuKenji Kimura
- Author Heading
- Periodical title
- Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
- No. or year of volume/issue
- 40(4A) (通号 537) 2001.4
- Volume
- 40
- Issue
- 4A
- Sequential issue number
- 537
- Pages
- 2119～2122