薄板の一体成形による平行平板構造を用いた吊り下げ型角速度センサ
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- Material Type
- 記事
- Author/Editor
- 佐藤 宏司新井 史人福田 敏男 他
- Periodical title
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
- No. or year of volume/issue
- 121(5) 2001.5
- Volume
- 121
- Issue
- 5
- Pages
- 281～287
- Publication date of volume/issue (W3CDTF)
- 2001-05