EUVリソグラフィー技術の開発状況 (特集次世代リソグラフィー技術)

EUVリソグラフィー技術の開発状況

(特集次世代リソグラフィー技術)

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Material Type: 記事
Title: EUVリソグラフィー技術の開発状況
Author/Editor: 岡崎信次
Series Title: 特集次世代リソグラフィー技術
Author Heading: 岡崎信次
Periodical title: O plus E : Optics + electronics
No. or year of volume/issue: 23(6) (通号 259) 2001.6
Volume: 23
Issue: 6
Sequential issue number: 259
Pages: 684～689
Publication date of volume/issue (W3CDTF): 2001-06
ISSN (Periodical Title): 0911-5943
ISSN-L (Periodical Title): 0911-5943
Publication (Periodical Title): 東京 : アドコム・メディア
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN33
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-1465
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 5794095
http://id.ndl.go.jp/bib/5794095
Bibliographic Record Category (NDL): 632