解説高周波放電プラズマを利用した高速スパッタ装置

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Material Type: 記事
Title: 解説高周波放電プラズマを利用した高速スパッタ装置
Author/Editor: 山下睦雄
Author Heading: 山下睦雄
Periodical title: 真空 = Journal of the Vacuum Society of Japan
No. or year of volume/issue: 44(5) 2001.5
Volume: 44
Issue: 5
Pages: 512～519
Publication date of volume/issue (W3CDTF): 2001-05
ISSN (Periodical Title): 0559-8516
ISSN-L (Periodical Title): 0559-8516
Publication (Periodical Title): 東京 : 日本真空協会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN15
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-474
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 5797230
http://id.ndl.go.jp/bib/5797230
Bibliographic Record Category (NDL): 632