速報ヘリコン波励起プラズマスパッタ法による固体電解質型燃料電池の作製--ヘリコン波励起プラズマのエネルギー制御

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Material Type: 記事
Title: 速報ヘリコン波励起プラズマスパッタ法による固体電解質型燃料電池の作製--ヘリコン波励起プラズマのエネルギー制御
Author/Editor: 森本克己
岡山英夫
長田昭義
Author Heading: 森本克己
岡山英夫
長田昭義
Periodical title: 真空 = Journal of the Vacuum Society of Japan
No. or year of volume/issue: 44(5) 2001.5
Volume: 44
Issue: 5
Pages: 539～543
Publication date of volume/issue (W3CDTF): 2001-05
ISSN (Periodical Title): 0559-8516
ISSN-L (Periodical Title): 0559-8516
Publication (Periodical Title): 東京 : 日本真空協会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN15
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-474
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 5797292
http://id.ndl.go.jp/bib/5797292
Bibliographic Record Category (NDL): 632