Adhesion and Cohesion Analysis of ArF/SOR Resist Patterns with Microtip of Atomic Force Microscope(AFM)
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- Material Type
- 記事
- Author/Editor
- Akira KawaiNorio Moriike
- Author Heading
- Periodical title
- Journal of photopolymer science and technology
- No. or year of volume/issue
- 14(4) 2001
- Volume
- 14
- Issue
- 4
- Pages
- 507~512
- Publication date of volume/issue (W3CDTF)
- 2001