CMP産業の現状と展望 (特集1 半導体平坦化CMP技術と他分野応用におけるトライボロジー)

CMP産業の現状と展望

(特集1 半導体平坦化CMP技術と他分野応用におけるトライボロジー)

This page shows libraries in Japan other than the National Diet Library that hold the material.

Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.

other

CiNii Research
Search Service
You can check the holdings of institutions and databases with which CiNii Research is linked at the site of CiNii Research.
Check the holdings of this book

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Material Type: 記事
Title: CMP産業の現状と展望
Author/Editor: 武野泰彦
Series Title: 特集1 半導体平坦化CMP技術と他分野応用におけるトライボロジー
Author Heading: 武野泰彦
Periodical title: 月刊トライボロジー
No. or year of volume/issue: 15(7) (通号 167) 2001.7
Volume: 15
Issue: 7
Sequential issue number: 167
Pages: 17～19
Publication date of volume/issue (W3CDTF): 2001-07
ISSN (Periodical Title): 0914-6121
ISSN-L (Periodical Title): 0914-6121
Publication (Periodical Title): 東京 : 新樹社
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN11
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-1638
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 5837682
http://id.ndl.go.jp/bib/5837682
Bibliographic Record Category (NDL): 632