IUVSTAだより IUVSTA Electronic Materials and Processing分野の研究動向

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Material Type: 記事
Title: IUVSTAだより IUVSTA Electronic Materials and Processing分野の研究動向
Author/Editor: 吉田貞史
Author Heading: 吉田貞史
Periodical title: 真空 = Journal of the Vacuum Society of Japan
No. or year of volume/issue: 44(10) 2001.10
Volume: 44
Issue: 10
Pages: 855～859
Publication date of volume/issue (W3CDTF): 2001-10
ISSN (Periodical Title): 0559-8516
ISSN-L (Periodical Title): 0559-8516
Publication (Periodical Title): 東京 : 日本真空協会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN15
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-474
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 5964159
http://id.ndl.go.jp/bib/5964159
Bibliographic Record Category (NDL): 632