研究速報微細周期パターン上へのプラズマ重合膜の堆積特性

Journal name: 日本接着学会誌 = Journal of the Adhesion Society of Japan : adhesion 37(11) 2001

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Material Type: 記事
Title: 研究速報微細周期パターン上へのプラズマ重合膜の堆積特性
Author/Editor: 磯部亮
河合晃
Author Heading: 磯部亮
河合晃
Periodical title: 日本接着学会誌 = Journal of the Adhesion Society of Japan : adhesion
No. or year of volume/issue: 37(11) 2001
Volume: 37
Issue: 11
Pages: 433～436
Publication date of volume/issue (W3CDTF): 2001
ISSN (Periodical Title): 0916-4812
ISSN-L (Periodical Title): 0916-4812
Publication (Periodical Title): 大阪 : 日本接着学会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZP16
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z17-134
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 5965640
http://id.ndl.go.jp/bib/5965640
Bibliographic Record Category (NDL): 632