Optical Emission Spectroscopy of Pulsed Inductively Coupled Plasma in Ar
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- Material Type
- 記事
- Author/Editor
- Kazuya HiokiNaoki ItazuZoran Lj. Petrovic 他
- Author Heading
- Periodical title
- Japanese journal of applied physics. Pt. 2, Letters
- No. or year of volume/issue
- 40(11A) (通号 355) 2001.11.1
- Volume
- 40
- Issue
- 11A
- Sequential issue number
- 355
- Pages
- L1183～1186