縦型φ300mm装置Zestone-3(C)の開発

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Material Type: 記事
Title: 縦型φ300mm装置Zestone-3(C)の開発
Author/Editor: 浦辺俊光
柳川秀宏
Author Heading: 浦辺俊光
柳川秀宏
Periodical title: 日立国際電気技報 / 企画部研究管理課編
No. or year of volume/issue: (1) 2001.03
Issue: 1
Pages: 56～60
Publication date of volume/issue (W3CDTF): 2001-03
ISSN (Periodical Title): 1346-5953
ISSN-L (Periodical Title): 1346-5953
Publication (Periodical Title): 羽村 : 日立国際電気
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN31
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z74-C327
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 5969052
http://id.ndl.go.jp/bib/5969052
Bibliographic Record Category (NDL): 632