資料液体有機シラン原料を用いたシリコンカーバイド薄膜製造シミュレーション

Journal name: 島根県産業技術センター研究報告 = Report of the Shimane Institute for Industrial Technology (38) 2001.11

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Material Type: 記事
Title: 資料液体有機シラン原料を用いたシリコンカーバイド薄膜製造シミュレーション
Author/Editor: 朝比奈秀一
坂本明美
金山信幸
Author Heading: 朝比奈秀一
坂本明美
金山信幸
Periodical title: 島根県産業技術センター研究報告 = Report of the Shimane Institute for Industrial Technology
No. or year of volume/issue: (38) 2001.11
Issue: 38
Pages: 63～65
Publication date of volume/issue (W3CDTF): 2001-11
ISSN (Periodical Title): 1345-7675
ISSN-L (Periodical Title): 1345-7675
Publication (Periodical Title): 松江 (島根県) : 島根県産業技術センター
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZM2
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z14-700
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 5977904
http://id.ndl.go.jp/bib/5977904
Bibliographic Record Category (NDL): 632