Substrate Bias Effect on Amorphous Hydrogenated Carbon Films Deposited by Filtered Cathodic Arc Deposition
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- Material Type
- 記事
- Author/Editor
- Yan-Way LiChia-Fu ChenYew-Bin Shue 他
- Author Heading
- Periodical title
- Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
- No. or year of volume/issue
- 40(11) (通号 548) 2001.11
- Volume
- 40
- Issue
- 11
- Sequential issue number
- 548
- Pages
- 6574～6580