原子間カプローブ搭載超高精度三次元測定機 (特集 超精密形状測定技術)

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原子間カプローブ搭載超高精度三次元測定機

(特集 超精密形状測定技術)

Call No. (NDL)
Z16-1147
Bibliographic ID of National Diet Library
5992223
Material type
記事
Author
吉住 恵一
Publisher
東京 : 砥粒加工学会
Publication date
2001-12
Material Format
Paper
Journal name
Abrasive technology : 砥粒加工学会誌 : journal of the Japan Society for Abrasive Technology 45(12) (通号 232) 2001.12
Publication Page
p.562~565
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Paper

Material Type
記事
Author/Editor
吉住 恵一
Author Heading
Periodical title
Abrasive technology : 砥粒加工学会誌 : journal of the Japan Society for Abrasive Technology
No. or year of volume/issue
45(12) (通号 232) 2001.12
Volume
45
Issue
12
Sequential issue number
232