位相変調型微分干渉顕微鏡を用いた高精度段差計測 (特集最近の光計測検査技術)

位相変調型微分干渉顕微鏡を用いた高精度段差計測

(特集最近の光計測検査技術)

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Material Type: 記事
Title: 位相変調型微分干渉顕微鏡を用いた高精度段差計測
Author/Editor: 石渡裕
Series Title: 特集最近の光計測検査技術
Author Heading: 石渡裕
Periodical title: O plus E : Optics + electronics
No. or year of volume/issue: 23(12) (通号 265) 2001.12
Volume: 23
Issue: 12
Sequential issue number: 265
Pages: 1455～1459
Publication date of volume/issue (W3CDTF): 2001-12
ISSN (Periodical Title): 0911-5943
ISSN-L (Periodical Title): 0911-5943
Publication (Periodical Title): 東京 : アドコム・メディア
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN33
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-1465
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 5996814
http://id.ndl.go.jp/bib/5996814
Bibliographic Record Category (NDL): 632