産業究極の薄さの窒化シリコン膜の形成に成功--シリコン基板上に結晶構造を持った単一分子層窒化シリコン膜を初めて形成

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Material Type: 記事
Title: 産業究極の薄さの窒化シリコン膜の形成に成功--シリコン基板上に結晶構造を持った単一分子層窒化シリコン膜を初めて形成
Author/Editor: 産業技術総合研究所
Author Heading: 産業技術総合研究所
Periodical title: 経済産業公報 / 経済産業調査会編
No. or year of volume/issue: (14945) 2002.1.15
Issue: 14945
Pages: 6～8
Publication date of volume/issue (W3CDTF): 2002-01-15
Publication (Periodical Title): 東京 : 経済産業調査会
Place of Publication (Country Code): JP
Text Language Code: jpn
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: CZ-411-3
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 6022607
http://id.ndl.go.jp/bib/6022607
Bibliographic Record Category (NDL): 632