大気圧雰囲気下でのフッ素系ポリマーのプラズマ重合--粘着チープの剥離材としての応用

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Material Type: 記事
Title: 大気圧雰囲気下でのフッ素系ポリマーのプラズマ重合--粘着チープの剥離材としての応用
Author/Editor: 田中邦翁
小駒益弘
Author Heading: 田中邦翁
小駒益弘
Periodical title: 真空 = Journal of the Vacuum Society of Japan
No. or year of volume/issue: 45(2) 2002.2
Volume: 45
Issue: 2
Pages: 80～84
Publication date of volume/issue (W3CDTF): 2002-02
ISSN (Periodical Title): 0559-8516
ISSN-L (Periodical Title): 0559-8516
Publication (Periodical Title): 東京 : 日本真空協会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN15
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-474
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 6086508
http://id.ndl.go.jp/bib/6086508
Bibliographic Record Category (NDL): 632