SOI基板上マイクロヒータを用いた超小型熱分析センサ(特集音響および振動センサとその信号処理技術)

Journal name: 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines 122(4) 2002.4

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Material Type: 記事
Title: SOI基板上マイクロヒータを用いた超小型熱分析センサ
Author/Editor: 古谷充宏
藤原茂美
木村光照
Series Title: 特集音響および振動センサとその信号処理技術
Author Heading: 古谷充宏
藤原茂美
木村光照
Periodical title: 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
No. or year of volume/issue: 122(4) 2002.4
Volume: 122
Issue: 4
Pages: 207～211
Publication date of volume/issue (W3CDTF): 2002-04
ISSN (Periodical Title): 1341-8939
ISSN-L (Periodical Title): 1341-8939
Publication (Periodical Title): 東京 : 電気学会
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: 熱型センサ
半導体
Si
ダイアフラム
thermal sensor
thermal analysis
semiconductor
heater
diaphragm
NDLC: ZN31
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-B380
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 6123458
http://id.ndl.go.jp/bib/6123458
Bibliographic Record Category (NDL): 632