Si微細加工および貼り合わせ技術を利用した超微細ピッチ配線技術
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- Material Type
- 記事
- Author/Editor
- 鈴木 孝彰内野 和好横井 哲郎 他
- Periodical title
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
- No. or year of volume/issue
- 122(8) 2002.8
- Volume
- 122
- Issue
- 8
- Pages
- 409～414
- Publication date of volume/issue (W3CDTF)
- 2002-08