解説 エキシマランプによる光表面改質 (小特集 エキシマランプと表面処理)
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- Material Type
- 記事
- Title
- Author/Editor
- 中村 勝加藤 千尋田中 聡美 他
- Series Title
- Periodical title
- 表面技術 = Journal of the Surface Finishing Society of Japan
- No. or year of volume/issue
- 53(8) 2002
- Volume
- 53
- Issue
- 8
- Pages
- 507～510