グラビアとインタビュー精密工学の最前線半導体先端テクノロジーズ/産業技術総合研究所スーパークリーンルーム産学官連携研究棟森野明彦

Journal name: 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会編 68(9) (通号 813) 2002.9

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Material Type: 記事
Title: グラビアとインタビュー精密工学の最前線半導体先端テクノロジーズ/産業技術総合研究所スーパークリーンルーム産学官連携研究棟森野明彦
Author/Editor: 森野明彦
野澤龍介
Author Heading: 森野明彦
野澤龍介
Periodical title: 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会編
No. or year of volume/issue: 68(9) (通号 813) 2002.9
Volume: 68
Issue: 9
Sequential issue number: 813
Pages: 1133～1136
Publication date of volume/issue (W3CDTF): 2002-09
ISSN (Periodical Title): 0912-0289
ISSN-L (Periodical Title): 0912-0289
Publication (Periodical Title): 東京 : 精密工学会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN12
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-466
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 6290115
http://id.ndl.go.jp/bib/6290115
Bibliographic Record Category (NDL): 632