Simulation of Phosphorus Diffusion Profiles with Different Phosphorus Surface Concentration at the Same Diffusion Temperature in Silicon

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Simulation of Phosphorus Diffusion Profiles with Different Phosphorus Surface Concentration at the Same Diffusion Temperature in Silicon

Call No. (NDL): Z53-A375
Bibliographic ID of National Diet Library: 6305468

Material type: 記事

Author: Masayuki Yoshidaほか

Publisher: Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics

Publication date: 2002-09

Material Format: Digital

Journal name: Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP 41(9) (通号 564) 2002.9

Publication Page: p.5493～5502

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Detailed bibliographic record

Summary, etc.：: Four diffusion models based on the pair diffusion models of vacancy and interstitial mechanisms are adopted for the simulation of six experimental pro...

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Material Type: 記事
Title: Simulation of Phosphorus Diffusion Profiles with Different Phosphorus Surface Concentration at the Same Diffusion Temperature in Silicon
Author/Editor: Masayuki Yoshida
Shuji Tanaka
Author Heading: Masayuki Yoshida
Shuji Tanaka
Periodical title: Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
No. or year of volume/issue: 41(9) (通号 564) 2002.9
Volume: 41
Issue: 9
Sequential issue number: 564
Pages: 5493～5502
Publication date of volume/issue (W3CDTF): 2002-09
ISSN (Periodical Title): 0021-4922
ISSN-L (Periodical Title): 0021-4922
Publication (Periodical Title): Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics
Place of Publication (Country Code): JP
Text Language Code: eng
Subject Heading: pair diffusion model
effective P diffusion coefficient
controlling process of P diffusion
control of excess self-interstitial
decrease in quasi self-interstitial formation energy
diffusion coefficient of negatively charged P-V pair
diffusion coefficient of neutral P-V pair
NDLC: ZM35
Target Audience: 一般
Collection (particular): 国立国会図書館デジタルコレクション > デジタル化資料 > 雑誌
https://dl.ndl.go.jp/collections/A00002
Access Restrictions: 国立国会図書館内限定公開
Service for the Digitized Contents Transmission Service: 図書館・個人送信対象
Availability of remote photoduplication service: 可
Holding library: 国立国会図書館
Call No.: Z53-A375
Periodical Title (Persistent ID (NDL)): info:ndljp/pid/11226632
https://dl.ndl.go.jp/pid/11226632
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 6305468
http://id.ndl.go.jp/bib/6305468
Bibliographic Record Category (NDL): 632