Passivation and Etching of Wafer Surfaces in HF-H2O2-IPA Solutions
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- Material Type
- 記事
- Author/Editor
- Dae-Hong EomKy-Sub KimJin-Goo Park
- Author Heading
- Periodical title
- Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
- No. or year of volume/issue
- 41(10) (通号 565) 2002.10
- Volume
- 41
- Issue
- 10
- Sequential issue number
- 565
- Pages
- 5881～5886