Metalorganic Chemical Vapor Deposition of Thin Film ZrO2 and Pb(Zr,Ti)O3: Precursor Chemistry and Process Characteristics (Special Issue Ferroelectric Materials and Their Applications)
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- Material Type
- 記事
- Author/Editor
- Ing-Shin ChenBryan C. HendrixSteven M. Bilodeau 他
- Author Heading
- Periodical title
- Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
- No. or year of volume/issue
- 41(11B) (通号 567) (Special Issue) 2002.11
- Volume
- 41
- Issue
- 11B
- Sequential issue number
- 567