解説 静電マイクロアクチュエータの駆動機構と設計限界 (特集 マイクロマシン--実用化とナノ領域への展開)
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CiNii Research
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- Material Type
- 記事
- Author/Editor
- 年吉 洋
- Series Title
- Author Heading
- Periodical title
- 計測と制御 : journal of the Society of Instrument and Control Engineers
- No. or year of volume/issue
- 42(1) 2003.1
- Volume
- 42
- Issue
- 1
- Pages
- 18～23