Si結晶表面のナノスケール改質のためのシミュレーション--初期酸化およびイオン注入素過程の研究

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Material Type: 記事
Title: Si結晶表面のナノスケール改質のためのシミュレーション--初期酸化およびイオン注入素過程の研究
Author/Editor: 大泊巌
渡邉孝信
Author Heading: 大泊巌
渡邉孝信
Periodical title: 粉砕 = The micromeritics
No. or year of volume/issue: (46) 2002
Issue: 46
Pages: 37～44
Publication date of volume/issue (W3CDTF): 2002
ISSN (Periodical Title): 0429-9051
ISSN-L (Periodical Title): 0429-9051
Publication (Periodical Title): 枚方 : ホソカワミクロン
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZP5
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z17-723
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 6520619
http://id.ndl.go.jp/bib/6520619
Bibliographic Record Category (NDL): 632