Volume number87(5) 2003.5
エリプソメトリーによ...

エリプソメトリーによるタングステンの複素屈折率の測定--エリプソメーター構築とその測定精度の検討

Icons representing 記事

エリプソメトリーによるタングステンの複素屈折率の測定--エリプソメーター構築とその測定精度の検討

Call No. (NDL)
Z16-302
Bibliographic ID of National Diet Library
6571060
Material type
記事
Author
佐藤 歩ほか
Publisher
東京 : 照明学会
Publication date
2003-05
Material Format
Paper
Journal name
照明学会誌 = Journal of the Illuminating Engineering Institute of Japan 87(5) 2003.5
Publication Page
p.328~334
View All

Holdings of Libraries in Japan

This page shows libraries in Japan other than the National Diet Library that hold the material.

Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.

other

  • CiNii Research

    Search Service
    You can check the holdings of institutions and databases with which CiNii Research is linked at the site of CiNii Research.

Bibliographic Record

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Paper

Material Type
記事
Author/Editor
佐藤 歩
関根 征士
大河 正志
Periodical title
照明学会誌 = Journal of the Illuminating Engineering Institute of Japan
No. or year of volume/issue
87(5) 2003.5
Volume
87
Issue
5
Pages
328~334
Publication date of volume/issue (W3CDTF)
2003-05