パターン付き埋め込み酸化膜をもつ特殊SOIウエハーの製作プロセスとその広角2次元光スキャナへの適用

Journal name: 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines 123(5) 2003.5

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Material Type: 記事
Title: パターン付き埋め込み酸化膜をもつ特殊SOIウエハーの製作プロセスとその広角2次元光スキャナへの適用
Author/Editor: 片白雅浩
有馬通継
徳田一成他
Author Heading: 片白雅浩
有馬通継
徳田一成
Periodical title: 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
No. or year of volume/issue: 123(5) 2003.5
Volume: 123
Issue: 5
Pages: 152～157
Publication date of volume/issue (W3CDTF): 2003-05
ISSN (Periodical Title): 1341-8939
ISSN-L (Periodical Title): 1341-8939
Publication (Periodical Title): 東京 : 電気学会
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: MEMS
接合
オプティカルMEMS
SOI wafer
bonding
embedded silicon dioxide
optical MEMS
NDLC: ZN31
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-B380
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 6571330
http://id.ndl.go.jp/bib/6571330
Bibliographic Record Category (NDL): 632