ヘキサメチルジシランを用いたイオンビーム誘起CVD法

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Material Type: 記事
Title: ヘキサメチルジシランを用いたイオンビーム誘起CVD法
Author/Editor: 木内正人
松谷貴臣
竹内孝江
Author Heading: 木内正人
松谷貴臣
竹内孝江
Periodical title: イオン注入表層処理シンポジウム予稿集
No. or year of volume/issue: (通号 17) 2001.11.30
Sequential issue number: 17
Pages: 15～17
Publication date of volume/issue (W3CDTF): 2001-11-30
ISSN (Periodical Title): 0917-1460
ISSN-L (Periodical Title): 0917-1460
Publication (Periodical Title): 和光 : イオン注入表層処理研究会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZP5
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z17-1131
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 6582659
http://id.ndl.go.jp/bib/6582659
Bibliographic Record Category (NDL): 632