Fabrication of Carbon Nanostructure onto the Apex of Scanning Tunneling Microscopy Probe by Chemical Vapor Deposition (Special Issue: Scanning Probe Microscopy)

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Fabrication of Carbon Nanostructure onto the Apex of Scanning Tunneling Microscopy Probe by Chemical Vapor Deposition(Special Issue: Scanning Probe Microscopy)

Call No. (NDL)
Z53-A375
Bibliographic ID of National Diet Library
6630201
Material type
記事
Author
Masamichi Yoshimuraほか
Publisher
Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics
Publication date
2003-07
Material Format
Digital
Journal name
Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP 42(7B) (通号 580) 2003.7
Publication Page
p.4841~4843
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Detailed bibliographic record

Summary, etc.:

Microwave plasma-enhanced chemical vapor deposition (MW-PECVD) has been applied to fabricate a novel scanning tunneling microscopy (STM) probe with ca...

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Bibliographic Record

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Digital

Material Type
記事
Author/Editor
Masamichi Yoshimura
Sadaharu Jo
Kazuyuki Ueda
Periodical title
Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
No. or year of volume/issue
42(7B) (通号 580) 2003.7
Volume
42
Issue
7B
Sequential issue number
580