雑誌真空
速報 高周波スパッタ...

速報 高周波スパッタリング法によるNi-イットリア安定化ジルコニアサーメット燃料極を用いた薄膜固体酸化物燃料電池の特性

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速報 高周波スパッタリング法によるNi-イットリア安定化ジルコニアサーメット燃料極を用いた薄膜固体酸化物燃料電池の特性

Call No. (NDL)
Z16-474
Bibliographic ID of National Diet Library
6639893
Material type
記事
Author
掛山 智哉ほか
Publisher
東京 : 日本真空協会
Publication date
2003-06
Material Format
Paper
Journal name
真空 = Journal of the Vacuum Society of Japan 46(6) 2003.6
Publication Page
p.524~528
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Paper Digital

Material Type
記事
Author/Editor
掛山 智哉
長田 昭義
Periodical title
真空 = Journal of the Vacuum Society of Japan
No. or year of volume/issue
46(6) 2003.6
Volume
46
Issue
6
Pages
524~528
Publication date of volume/issue (W3CDTF)
2003-06