Characteristics of Capillary Discharge Plasma Tool for Micro-Machine Fabrications

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Characteristics of Capillary Discharge Plasma Tool for Micro-Machine Fabrications

Call No. (NDL)
Z16-312
Bibliographic ID of National Diet Library
6639923
Material type
記事
Author
Jen-Shih Changほか
Publisher
東京 : 東京電機大学工学部
Publication date
2001-12
Material Format
Paper
Journal name
東京電機大学工学部研究報告 / 東京電機大学工学部 編 (49) 2001.12
Publication Page
p.1~11
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Paper

Material Type
記事
Author/Editor
Jen-Shih Chang
A. Chakrabarti
M. Nagai 他
Alternative Title
マイクロマシーン作成用の細管放電プラズマシールの特性
Periodical title
東京電機大学工学部研究報告 / 東京電機大学工学部 編
No. or year of volume/issue
(49) 2001.12
Issue
49
Pages
1~11
Publication date of volume/issue (W3CDTF)
2001-12