低温触媒CVD装置の...

低温触媒CVD装置の開発 (特集/新規事業創出と大学発ベンチャー)

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低温触媒CVD装置の開発

(特集/新規事業創出と大学発ベンチャー)

Call No. (NDL)
Z17-54
Bibliographic ID of National Diet Library
6646798
Material type
記事
Author
増田 淳ほか
Publisher
東京 : 小峰工業出版
Publication date
2003-08
Material Format
Paper
Journal name
化學工業 54(8) (通号 642) 2003.8
Publication Page
p.631~635
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Paper

Material Type
記事
Author/Editor
増田 淳
松村 英樹
南川 俊治
Periodical title
化學工業
No. or year of volume/issue
54(8) (通号 642) 2003.8
Volume
54
Issue
8
Sequential issue number
642