Effect of Slurry Surfactant on Nanotopography Impact in Chemical Mechanical Polishing

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Effect of Slurry Surfactant on Nanotopography Impact in Chemical Mechanical Polishing

Call No. (NDL): Z53-A375
Bibliographic ID of National Diet Library: 6684867

Material type: 記事

Author: Takeo Katohほか

Publisher: Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics

Publication date: 2003-09

Material Format: Digital

Journal name: Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP 42(9A) (通号 582) 2003.9

Publication Page: p.5430～5432

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Detailed bibliographic record

Summary, etc.：: The effect of surfactant in a ceria slurry on the impact of nanotopography on post-CMP oxide thickness deviation (OTD) was investigated in a blanket w...

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Material Type: 記事
Title: Effect of Slurry Surfactant on Nanotopography Impact in Chemical Mechanical Polishing
Author/Editor: Takeo Katoh
Sung-Jun Kim
Ungyu Paik 他
Author Heading: Takeo Katoh
Sung-Jun Kim
Ungyu Paik
Periodical title: Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
No. or year of volume/issue: 42(9A) (通号 582) 2003.9
Volume: 42
Issue: 9A
Sequential issue number: 582
Pages: 5430～5432
Publication date of volume/issue (W3CDTF): 2003-09
ISSN (Periodical Title): 0021-4922
ISSN-L (Periodical Title): 0021-4922
Publication (Periodical Title): Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics
Place of Publication (Country Code): JP
Text Language Code: eng
Subject Heading: STI
CMP
ceria
power spectral density
NDLC: ZM35
Target Audience: 一般
Collection (particular): 国立国会図書館デジタルコレクション > デジタル化資料 > 雑誌
https://dl.ndl.go.jp/collections/A00002
Access Restrictions: 国立国会図書館内限定公開
Service for the Digitized Contents Transmission Service: 図書館・個人送信対象
Availability of remote photoduplication service: 可
Holding library: 国立国会図書館
Call No.: Z53-A375
Periodical Title (Persistent ID (NDL)): info:ndljp/pid/11226652
https://dl.ndl.go.jp/pid/11226652
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 6684867
http://id.ndl.go.jp/bib/6684867
Bibliographic Record Category (NDL): 632