MEMSの産業化とナノテクとの融合 (小特集/MEMSの現状と将来展望)
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- Material Type
- 記事
- Title
- Author/Editor
- 平野 隆之
- Series Title
- Author Heading
- Periodical title
- 表面技術 = Journal of the Surface Finishing Society of Japan
- No. or year of volume/issue
- 54(10) 2003
- Volume
- 54
- Issue
- 10
- Pages
- 630～634