Furnace Annealing Behavior of B-deped Poly-SiGe Formed on Insulating Film
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- Material Type
- 記事
- Author/Editor
- Isao TsunodaTaizoh SadohMasanobu Miyao
- Author Heading
- Periodical title
- 九州大学大学院システム情報科学紀要 = Research reports on information science and electrical engineering of Kyushu University / 九州大学大学院システム情報科学研究院 編
- No. or year of volume/issue
- 8(2) 2003.9
- Volume
- 8
- Issue
- 2
- Pages
- 151～154
- Publication date of volume/issue (W3CDTF)
- 2003-09