技術報告 量子化学法...

技術報告 量子化学法によるトリクロロシランと吸着水の気相反応機構

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技術報告 量子化学法によるトリクロロシランと吸着水の気相反応機構

Call No. (NDL)
Z17-1192
Bibliographic ID of National Diet Library
6784028
Material type
記事
Author
中村 康一ほか
Publisher
川崎 : 日本酸素技術本部「日本酸素技報」編集事務局
Publication date
2003
Material Format
Paper
Journal name
日本酸素技報 (22) 2003
Publication Page
p.2~6
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Paper

Material Type
記事
Author/Editor
中村 康一
立花 明知
鈴木 克昌 他
Periodical title
日本酸素技報
No. or year of volume/issue
(22) 2003
Issue
22
Pages
2~6
Publication date of volume/issue (W3CDTF)
2003
ISSN (Periodical Title)
0914-8280