Si基板上PZT-PZN圧電体厚膜の低温形成

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Material Type: 記事
Title: Si基板上PZT-PZN圧電体厚膜の低温形成
Author/Editor: 田中克彦
久保田哲平
山田和弘他
Author Heading: 田中克彦
久保田哲平
山田和弘
Periodical title: 材料 / 日本材料学会 [編]
No. or year of volume/issue: 52(12) 2003.12
Volume: 52
Issue: 12
Pages: 1420～1424
Publication date of volume/issue (W3CDTF): 2003-12
ISSN (Periodical Title): 0514-5163
ISSN-L (Periodical Title): 0514-5163
Publication (Periodical Title): 京都 : 日本材料学会
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: Piezoelectric
Ferroelectric
Pb
Zr
Ti
O3
Zn
Nb
Thick film
Screen printing
Piezoelectric actuator
NDLC: ZM16
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z14-267
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 6788922
http://id.ndl.go.jp/bib/6788922
Bibliographic Record Category (NDL): 632