Cat-CVD技術の現状と将来展望:気相診断からデバイス応用まで

Journal name: 電子情報通信学会論文誌. C, エレクトロニクス = The IEICE transactions on electronics. C / 電子情報通信学会編 87(2) (通号 434) 2004.2

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Material Type: 記事
Title: Cat-CVD技術の現状と将来展望:気相診断からデバイス応用まで
Author/Editor: 増田淳
梅本宏信
松村英樹
Author Heading: 増田淳
梅本宏信
松村英樹
Periodical title: 電子情報通信学会論文誌. C, エレクトロニクス = The IEICE transactions on electronics. C / 電子情報通信学会編
No. or year of volume/issue: 87(2) (通号 434) 2004.2
Volume: 87
Issue: 2
Sequential issue number: 434
Pages: 203～215
Publication date of volume/issue (W3CDTF): 2004-02
ISSN (Periodical Title): 1345-2827
ISSN-L (Periodical Title): 1345-2827
Publication (Periodical Title): 東京 : 電子情報通信学会エレクトロニクスソサイエティ
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: 触媒化学気相成長
シリコン系薄膜
薄膜太陽電池
薄膜トランジスタ
TFT
NDLC: ZN33
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-607
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 6841318
http://id.ndl.go.jp/bib/6841318
Bibliographic Record Category (NDL): 632