Si酸窒化膜/Si(001)界面研究の最近の展開(小特集界面・粒界研究の新展開)

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Material Type: 記事
Title: Si酸窒化膜/Si(001)界面研究の最近の展開
Author/Editor: 五十嵐信行
渡部宏治
宮本良之
Series Title: 小特集界面・粒界研究の新展開
Author Heading: 五十嵐信行
渡部宏治
宮本良之
Periodical title: まてりあ = Materia Japan
No. or year of volume/issue: 43(2) 2004.2
Volume: 43
Issue: 2
Pages: 108～112
Publication date of volume/issue (W3CDTF): 2004-02
ISSN (Periodical Title): 1340-2625
ISSN-L (Periodical Title): 1340-2625
Publication (Periodical Title): 仙台 : 日本金属学会 ; 1994-
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: high-resolution transmission electron microscopy
oxi-nitrided silicon
SiO2/Si
Si3N4/Si
interfacial elastic strain
NDLC: ZP41
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z17-313
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 6869186
http://id.ndl.go.jp/bib/6869186
Bibliographic Record Category (NDL): 632